manufacturing electron-beam exposure system

См. также в других словарях:

• Electron beam lithography — (often abbreviated as e beam lithography) is the practice of scanning a beam of electrons in a patterned fashion across a surface covered with a film (called the resist),cite book |last= McCord |first=M. A. |coauthors=M. J. Rooks |title=… …   Wikipedia

• Electron — For other uses, see Electron (disambiguation). Electron Experiments with a Crookes tube first demonstrated the particle nature of electrons. In this illustration, the profile of the cross shaped target is projected against the tube face at right… …   Wikipedia

• Etec Systems, Inc. — Etec Systems was an American producer of Scanning Electron Microscopes, Electron Beam Lithography Tools, and Laser Beam Lithography Tools from 1970 until 2005. It was located in Hayward, California and Hillsboro, Oregon. Company History Etec… …   Wikipedia

• Ion beam — An ion beam is a type of particle beam consisting of ions. Ion beams have many uses in electronics manufacturing (principally ion implantation) and other industries. Today s ion beam sources are typically derived from the mercury vapor thrusters… …   Wikipedia

• radiation — radiational, adj. /ray dee ay sheuhn/, n. 1. Physics. a. the process in which energy is emitted as particles or waves. b. the complete process in which energy is emitted by one body, transmitted through an intervening medium or space, and… …   Universalium

• Physical Sciences — ▪ 2009 Introduction Scientists discovered a new family of superconducting materials and obtained unique images of individual hydrogen atoms and of a multiple exoplanet system. Europe completed the Large Hadron Collider, and China and India took… …   Universalium

• Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… …   Wikipedia

• Nanotechnology — Part of a series of articles on …   Wikipedia

• nanotechnology — /nan euh tek nol euh jee, nay neuh /, n. any technology on the scale of nanometers. [1987] * * * Manipulation of atoms, molecules, and materials to form structures on the scale of nanometres (billionths of a metre). These nanostructures typically …   Universalium

• Photolithography — For earlier uses of photolithography in printing, see Lithography. For the same process applied to metal, see Photochemical machining. Photolithography (or optical lithography ) is a process used in microfabrication to selectively remove parts of …   Wikipedia

• Gas tungsten arc welding — TIG welding of a bronze sculpture Gas tungsten arc welding (GTAW), also known as tungsten inert gas (TIG …   Wikipedia